JPH0648852Y2 - イオン注入装置におけるプラテン装置 - Google Patents
イオン注入装置におけるプラテン装置Info
- Publication number
- JPH0648852Y2 JPH0648852Y2 JP1985116482U JP11648285U JPH0648852Y2 JP H0648852 Y2 JPH0648852 Y2 JP H0648852Y2 JP 1985116482 U JP1985116482 U JP 1985116482U JP 11648285 U JP11648285 U JP 11648285U JP H0648852 Y2 JPH0648852 Y2 JP H0648852Y2
- Authority
- JP
- Japan
- Prior art keywords
- platen
- wafer
- ion implantation
- rotating shaft
- platen device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005468 ion implantation Methods 0.000 title claims description 9
- 238000003825 pressing Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 33
- 238000010884 ion-beam technique Methods 0.000 description 7
- 230000000452 restraining effect Effects 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- 239000007924 injection Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985116482U JPH0648852Y2 (ja) | 1985-07-31 | 1985-07-31 | イオン注入装置におけるプラテン装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985116482U JPH0648852Y2 (ja) | 1985-07-31 | 1985-07-31 | イオン注入装置におけるプラテン装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6226036U JPS6226036U (en]) | 1987-02-17 |
| JPH0648852Y2 true JPH0648852Y2 (ja) | 1994-12-12 |
Family
ID=31001113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985116482U Expired - Lifetime JPH0648852Y2 (ja) | 1985-07-31 | 1985-07-31 | イオン注入装置におけるプラテン装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648852Y2 (en]) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5984838U (ja) * | 1982-11-30 | 1984-06-08 | 日本電気ホームエレクトロニクス株式会社 | ウエ−ハ加熱装置 |
-
1985
- 1985-07-31 JP JP1985116482U patent/JPH0648852Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6226036U (en]) | 1987-02-17 |
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